This document covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less "nanoscale" are considered.
The monitoring given in this document is for use mainly in "operational" states.
NOTE 1 For the purposes of this document, reference is made to "nanoscale particles", which means all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
NOTE 2 As a consequence, the specifications for monitoring air cleanliness by nanoscale particle concentration of the cleanroom in operational state also considers process specifics, e.g., used equipment, personnel behaviour, etc.
NOTE 3 Health and safety considerations are excluded from this document.
| Edition : | 1st |
| File Size : | 1
file
, 1.3 MB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Number of Pages : | 18 |
| Product Code(s) : | 1, 1, 1 |
| Published : | 08/01/2018 |
