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AS ISO 17560-2006 PDF

AS ISO 17560-2006 PDF

Name:
AS ISO 17560-2006 PDF

Published Date:
10/20/2006

Status:
[ Withdrawn ]

Description:

Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of boron in silicon

Publisher:
Standards Australia

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Czech version):
200 business days
SKU:
as-iso-17560-2006_2047890
Choose Document Language:
15.25 €
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Adopts ISO 17560:2002 to specify a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon and using stylus profilometry or optical interferometry for depth scale calibration.
Edition : 1st
File Size : 1 file , 770 KB
ISBN(s) : 0733777872
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 10
Product Code(s) : 10090409, 10090404, 10090419
Published : 10/20/2006

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