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Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration

Published Date: 05/01/2019

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Published Date: 10/20/2023

Cleanrooms and Associated Controlled Environments - Part 18: Assessment of Suitability of Consumables

Published Date: 11/01/2022

Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up