ASTM ADJF0576 PDF

Name:
ASTM ADJF0576 PDF

Published Date:

Status:
Active

Description:

Adjunct to F576 Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

Graphs for determining refractive index and standard deviation (2)

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Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)

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