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ASTM F1152-93(2001) PDF

ASTM F1152-93(2001) PDF

Name:
ASTM F1152-93(2001) PDF

Published Date:
01/01/2001

Status:
Active

Description:

Standard Test Method for Dimensions of Notches on Silicon Wafers

Publisher:
ASTM International

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$15
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1.1 This test method covers a nondestructive procedure to determine whether or not the dimensions of fiducial notches on silicon wafers fall within specified limits.

1.2 The values stated in SI units are to be regarded as the standard. The values given in parentheses are for information only.

1.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.


File Size : 1 file , 30 KB
Note : This product is unavailable in Russia, Ukraine, Belarus
Number of Pages : 3
Published : 01/01/2001

History

ASTM F1152-02
ASTM F1152-02
Published Date: 01/10/2002
Standard Test Method for Dimensions of Notches on Silicon Wafers (Withdrawn 2003)
$13.8
ASTM F1152-93
ASTM F1152-93
Published Date: 01/10/2002
Standard Test Method for Dimensions of Notches on Silicon Wafers
$16.2
ASTM F1152-93(2001)
ASTM F1152-93(2001)
Published Date: 01/01/2001
Standard Test Method for Dimensions of Notches on Silicon Wafers
$15

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