ASTM F1376-92(2012) PDF

1.1 This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.

1.2 Elements analyzed and reported in this guide are as follows:

1.3 Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.

1.4 Limitations:

1.5 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.6 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.