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ASTM F154-02 PDF

ASTM F154-02 PDF

Name:
ASTM F154-02 PDF

Published Date:
01/01/2002

Status:
[ Withdrawn ]

Description:

Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)

Publisher:
ASTM International

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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$19.5
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This standard was transferred to SEMI (www.semi.org) May 2003

1.1 The purpose of this guide is to list, illustrate, and provide reference for various characteristic features and contaminants that are seen on highly specular silicon wafers. Recommended practices for delineation and observation of these artifacts are referenced. The artifacts described in this guide are intended to parallel and support the content of the SEMI M18. These artifacts and common synonyms are arranged alphabetically in Tables 1 and 2 and illustrated in Figs. 1-68 .


Note : This product is unavailable in Russia, Ukraine, Belarus
Number of Pages : 13
Published : 01/01/2002

History

ASTM F154-02
ASTM F154-02
Published Date: 01/01/2002
Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces (Withdrawn 2003)
$19.5
ASTM F154-00
ASTM F154-00
Published Date: 01/01/2000
Standard Guide for Identification of Structures and Contaminants Seen on Specular Silicon Surfaces
$19.5

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