Name:
ASTM F24-04 PDF
Published Date:
09/01/2004
Status:
Active
Publisher:
ASTM International
1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.
Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.
| File Size : | 1 file , 36 KB |
| Note : | This product is unavailable in Russia, Ukraine, Belarus |
| Number of Pages : | 4 |
| Published : | 09/01/2004 |
| Redline File Size : | 2 files , 71 KB |