BS 10/30211442 DC PDF

BS 10/30211442 DC PDF

Name:
BS 10/30211442 DC PDF

Published Date:
03/11/2010

Status:
Active

Description:

BS EN 62047-10. Semiconductor devices. Micro electromechanical devices. Part 10. Micro-pillar compression test for MEMS materials

Publisher:
BSI Group

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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Cross References:
IEC 62047-1:2005
IEC 62047-2:2006
IEC 62047-8
ASTM E9-89a:1995


All current amendments available at time of purchase are included with the purchase of this document.
Number of Pages : 12
Published : 03/11/2010

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