BS 10/30211446 DC PDF

Name:
BS 10/30211446 DC PDF

Published Date:
03/11/2010

Status:
Active

Description:

BS EN 62047-11. Semiconductor devices. Micro-electromechanical devices. Part 11. Test method for linear thermal expansion coefficients of MEMS materials

Publisher:
BSI Group

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

Cross References:
IEC 62047-1
IEC 62047-3

All current amendments available at time of purchase are included with the purchase of this document.

Number of Pages :	14
Published :	03/11/2010

History

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BS 10/30211446 DC PDF

BS EN 62047-11. Semiconductor devices. Micro-electromechanical devices. Part 11. Test method for linear thermal expansion coefficients of MEMS materials

History

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