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BS 10/30211446 DC PDF
BS 10/30211446 DC PDF
Name:
BS 10/30211446 DC PDF
Published Date:
03/11/2010
Status:
Active
Description:
BS EN 62047-11. Semiconductor devices. Micro-electromechanical devices. Part 11. Test method for linear thermal expansion coefficients of MEMS materials
Publisher:
BSI Group
Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Cross References:
IEC 62047-1
IEC 62047-3
All current amendments available at time of purchase are included with the purchase of this document.
Number of Pages :
14
Published :
03/11/2010
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