BS 11/30231583 DC PDF

Name:
BS 11/30231583 DC PDF

Published Date:
03/08/2011

Status:
Active

Description:

BS EN 62047-17. Semiconductor devices. Micro-electromechanical devices Part 17. Bulge test method for measuring mechanical properties of thin films

Publisher:
BSI Group

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

Cross References:
IEC 62047-2:2006

All current amendments available at time of purchase are included with the purchase of this document.

Number of Pages :	26
Published :	03/08/2011

History

BS 11/30231583 DC

Published Date: 03/08/2011

BS EN 62047-17. Semiconductor devices. Micro-electromechanical devices Part 17. Bulge test method for measuring mechanical properties of thin films

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