BS IEC 62899-301-1:2017 PDF

BS IEC 62899-301-1:2017 defines measurement terms and methods related to the external dimension of a rigid plate master.

Measurement terms include geometrical size such as edge length, edge squareness, edge straightness and thickness, flatness of plate master substrates, and surface roughness of plate master.


Cross References:
ASTM D7127 - 13
ASTM F1438 - 93(2012)
ISO 1:2016
SEMI P1-0708
SEMI D7-94
SEMI D24-0200
SEMI D26-1000
SEMI D15-1296


All current amendments available at time of purchase are included with the purchase of this document.

File Size :	1 file , 1.8 MB
ISBN(s) :	9780580891403
Number of Pages :	28
Product Code(s) :	30317962, 30317962, 30317962
Published :	08/16/2017