Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

Publisher:
British Standard / International Organization for Standardization

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

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This document defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309^[2] and ASTM E1508^[3] and is outside the scope of this document.

All current amendments available at time of purchase are included with the purchase of this document.

File Size :	1 file , 1.3 MB
ISBN(s) :	9780539046939
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	22
Product Code(s) :	30394915, 30394915, 30394915
Published :	02/22/2021
Same As :	BS ISO 15632:2021

BS ISO 15632:2021 PDF

Microbeam analysis. Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)

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