Cross References: ISO 31 ISO 128-20 ISO 128-21 ISO 128-22 ISO 3098-0 ISO 3098-5 ISO 5457 ISO 6428 ISO 10209-1 ISO 14617 ISO 7200 ISO 81714-1 IEC 60617 IEC 61666 IEC 61355 IEC 61346-1 IEC 81714-2 IEC 82045-2 ISO 3864-1 ISO 10628:1997 ISO 15226 IEC 60204-1 IEC 61082-1 IEC 82045-1 ISO 924:1989 ISO 1219-2:1995
Cleanrooms and associated controlled environments -- Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration (Final Draft)