BS 10/30205425 DC PDF

Name:
BS 10/30205425 DC PDF

Published Date:
01/26/2010

Status:
Active

Description:

BS IEC 62047-12. Semiconductor devices. Micro-electromechanical devices. Part 12. A method for fatigue testing thin film materials using the resonant vibration of a MEMS structure

Publisher:
BSI Group

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

Cross References:
ISO 12107:2003
IEC 62047-2:2006
IEC 62047-3:2006

All current amendments available at time of purchase are included with the purchase of this document.

Number of Pages :	25
Published :	01/26/2010

History

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