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CEI EN 62047-17 PDF

CEI EN 62047-17 PDF

Name:
CEI EN 62047-17 PDF

Published Date:
01/01/2016

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices Part 17: Bulge test method for measuring mechanical properties of thin films

Publisher:
Comitato Elettrotecnico Italiano

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$13.2
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This part of IEC 62047 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μm to 10 μm, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm.

The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window.

Elastic modulus and residual stress for the film materials can be determined with this method.


Edition : 16
File Size : 1 file , 880 KB
Number of Pages : 34
Published : 01/01/2016

History

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