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CEI EN 62047-21 PDF

CEI EN 62047-21 PDF

Name:
CEI EN 62047-21 PDF

Published Date:
05/01/2016

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices Part 21: Test method for Poisson's ratio of thin film MEMS materials

Publisher:
Comitato Elettrotecnico Italiano

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Czech version):
200 business days
SKU:
cei-en-62047-21_2752832
Choose Document Language:
9.90 €
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This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.


Edition : 16
File Size : 1 file , 2.2 MB
Number of Pages : 22
Published : 05/01/2016

History

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