CEI EN 62047-8 PDF

CEI EN 62047-8 PDF

Name:
CEI EN 62047-8 PDF

Published Date:
05/01/2012

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices Part 8: Strip bending test method for tensile property measurement of thin films

Publisher:
Comitato Elettrotecnico Italiano

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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$22.8
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SAME AS IEC 62047-8

This international standard specifies the strip bending test method to measure tensile properties of thin films with high accuracy, repeatability, moderate effort of alignment and handling compared to the conventional tensile test. This testing method is valid for test pieces with a thickness between 50 nm and several mm, and with an aspect ratio (ratio of length to thickness) of more than 300.

The hanging strip (or bridge) between two fixed supports are widely adopted in MEMS or micro-machines. It is much easier to fabricate these strips than the conventional tensile test pieces. The test procedures are so simple to be readily automated. This international standard can be utilized as a quality control test for MEMS production since its testing throughput is very high compared to the conventional tensile test.


Edition : 12
File Size : 1 file , 1.2 MB
Number of Pages : 24
Published : 05/01/2012

History


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