This publication describes storage and handling of silane and silane mixtures including practical methods applicable for silane manufacturers, suppliers, and end users. G-13 addresses cylinder and bulk silane delivery systems for the semiconductor user community; including storage and handling at the user site and guidelines for the interconnecting piping system up to the distribution piping in the manufacturing facility. Setback distances are recommended based on heat radiation as well as overpressure produced by blast effects due to delayed ignition. The technical content is based on experimental testing conducted by CGA, Factory Mutual and SEMATECH. G-13 does not address silane usage and handling within the clean room areas.
| Edition : | 2nd |
| Number of Pages : | 50 |
| Published : | 02/28/2006 |
