Name:
Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology PDF
Published Date:
06/25/1998
Status:
[ Active ]
Publisher:
CRC Press Books
"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."
Authors: Saburo Nonogaki, Ueno Takumi, Toshio Ito
| Edition : | 1 |
| Number of Pages : | 336 |
| Published : | 06/25/1998 |
| isbn : | 9781482273762 |
