Optical Materials: Microstructuring Surfaces with Off-Electrode Plasma PDF

Features

Proposes a new approach to the generation of low temperature plasma

Uses new off electrode plasma techniques and equipment for fabricating optical microreliefs and micro- and nanostructures

Discusses how this new equipment differs from conventional equipment in that it is both simple and versatile and the new techniques are inexpensive and energy efficient and free from the drawbacks inherent in equivalent techniques used in and outside Russia

Describes how these new techniques and equipment help solve a major problem in diffractive optics: how to implement a series of off electrode plasma processes for fabricating diffraction microstructures on large aperture wafers

Offers results that stimulate new developments in gas discharge physics, plasma physics, solid state physics, and diffractive and computer diffractive optics

Summary

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.

Authors: Nikolay L. Kazanskiy, Vsevolod A. Kolpakov