Particle Control for Semiconductor Manufacturing PDF

ISBN: 9781351425759

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

Edition :	90
Number of Pages :	481
Published :	01/26/1990
isbn :	9781351425759