Name:
Ultra-Clean Technology Handbook: Volume 1: Ultra-Pure Water PDF
Published Date:
06/29/1993
Status:
[ Active ]
Publisher:
CRC Press Books
Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules.
Author: Ohmi
| Edition : | 93 |
| Number of Pages : | 945 |
| Published : | 06/29/1993 |
| isbn : | 9781351406437 |