DANSK DS/EN 62047-11 PDF

DANSK DS/EN 62047-11 PDF

Name:
DANSK DS/EN 62047-11 PDF

Published Date:
10/08/2013

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Publisher:
Dansk Standard

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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Choose Document Language:
$19.2
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SAME AS IEC 62047-11

IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.


Edition : 13
File Size : 1 file , 2 MB
Number of Pages : 26
Product Code(s) : DS-026, DS-026
Published : 10/08/2013

History


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