Name:
DANSK DS/EN 62047-11 PDF
Published Date:
10/08/2013
Status:
[ Active ]
Publisher:
Dansk Standard
IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
| Edition : | 13 |
| File Size : | 1 file , 2 MB |
| Number of Pages : | 26 |
| Product Code(s) : | DS-026, DS-026 |
| Published : | 10/08/2013 |