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DANSK DS/EN 62047-16 PDF

DANSK DS/EN 62047-16 PDF

Name:
DANSK DS/EN 62047-16 PDF

Published Date:
07/14/2015

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods

Publisher:
Dansk Standard

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$15.3
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IEC 62047-16:2015 specifies the test methods to measure the residual stresses of films with thickness in the range of 0,01 μ to 10 μ in MEMS structures fabricated by wafer curvature or cantilever beam deflection methods.


Edition : 15
File Size : 1 file , 1.6 MB
Number of Pages : 17
Product Code(s) : DS-017, DS-017
Published : 07/14/2015

History

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