DANSK DS/EN 62047-16 PDF

Name:
DANSK DS/EN 62047-16 PDF

Published Date:
07/14/2015

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices - Part 16: Test methods for determining residual stresses of MEMS films - Wafer curvature and cantilever beam deflection methods

Publisher:
Dansk Standard

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

IEC 62047-16:2015 specifies the test methods to measure the residual stresses of films with thickness in the range of 0,01 &mu; to 10 &mu; in MEMS structures fabricated by wafer curvature or cantilever beam deflection methods.

Edition :	15
File Size :	1 file , 1.6 MB
Number of Pages :	17
Product Code(s) :	DS-017, DS-017
Published :	07/14/2015

History

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