Name:
DANSK DS/EN 62047-16 PDF
Published Date:
07/14/2015
Status:
[ Active ]
Publisher:
Dansk Standard
IEC 62047-16:2015 specifies the test methods to measure the residual stresses of films with thickness in the range of 0,01 μ to 10 μ in MEMS structures fabricated by wafer curvature or cantilever beam deflection methods.
| Edition : | 15 |
| File Size : | 1 file , 1.6 MB |
| Number of Pages : | 17 |
| Product Code(s) : | DS-017, DS-017 |
| Published : | 07/14/2015 |
