DANSK DS/EN 62047-17 PDF

DANSK DS/EN 62047-17 PDF

Name:
DANSK DS/EN 62047-17 PDF

Published Date:
07/14/2015

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films

Publisher:
Dansk Standard

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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Choose Document Language:
$22.5
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SAME AS IEC 62047-17

IEC 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others. The thickness of the film is in the range of 0,1 μ to 10 μ, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm. The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window. Elastic modulus and residual stress for the film materials can be determined with this method.


Edition : 15
File Size : 1 file , 1.9 MB
Number of Pages : 33
Product Code(s) : DS-031, DS-031
Published : 07/14/2015

History


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