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DANSK DS/EN 62047-22 PDF

DANSK DS/EN 62047-22 PDF

Name:
DANSK DS/EN 62047-22 PDF

Published Date:
10/17/2014

Status:
[ Active ]

Description:

Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates

Publisher:
Dansk Standard

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$13.2
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SAME AS IEC 62047-22

IEC 62047-22:2014 specifies a tensile test method to measure electromechanical properties of conductive thin micro-electromechanical systems (MEMS) materials bonded on non-conductive flexible substrates. Conductive thin-film structures on flexible substrates are extensively utilized in MEMS, consumer products, and flexible electronics. The electrical behaviours of films on flexible substrates differ from those of freestanding films and substrates due to their interfacial interactions. Different combinations of flexible substrates and thin films often lead to various influences on the test results depending on the test conditions and the interfacial adhesion. The desired thickness of a thin MEMS material is 50 times thinner than that of the flexible substrate, whereas all other dimensions are similar to each other.


Edition : 14
File Size : 1 file , 1.4 MB
Number of Pages : 16
Product Code(s) : DS-013, DS-013
Published : 10/17/2014

History

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