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DANSK DS/EN 62047-25 PDF

DANSK DS/EN 62047-25 PDF

Name:
DANSK DS/EN 62047-25 PDF

Published Date:
12/11/2016

Status:
[ Active ]

Description:

Semiconductor devices – Micro-electromechanical devices – Part 25: Silicon based MEMS fabrication technology – Measurement method of pull-press and shearing strength of micro bonding area

Publisher:
Dansk Standard

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
SKU:
Choose Document Language:
$19.2
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SAME AS IEC 62047-25

IEC 62047-25:2016 specifies the in-situ testing method to measure the bonding strength of micro bonding area which is fabricated by micromachining technologies used in silicon-based micro-electromechanical system (MEMS). This document is applicable to the in-situ pull-press and shearing strength measurement of the micro bonding area fabricated by microelectronic technology process and other micromachining technology.


Edition : 16
File Size : 1 file , 2 MB
Number of Pages : 28
Product Code(s) : DS-026, DS-026
Published : 12/11/2016

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