DANSK DS/EN 62047-3 PDF

This International Standard specifies a standard test piece, which is used to guarantee the
propriety and accuracy of a tensile testing system for thin film materials with length and width
under 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices.
This International Standard is based on such a concept that a tensile testing system can be
guaranteed in propriety and accuracy, when the measured tensile strengths of the standard
test pieces, whose tensile strength is pre-determined, are within the designated range. It also
specifies the test pieces to minimize characteristics deviation among the pieces.