DANSK DS/IEC/TR 63258 PDF

Name:
DANSK DS/IEC/TR 63258 PDF

Published Date:
03/29/2021

Status:
[ Active ]

Description:

Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Publisher:
Dansk Standard

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.

Edition :	21
File Size :	1 file , 2 MB
Number of Pages :	26
Product Code(s) :	DS-026, DS-026
Published :	03/29/2021

History

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DANSK DS/IEC/TR 63258 PDF

Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films

History

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