DANSK DSF/ISO/FDIS 23131 PDF

Name:
DANSK DSF/ISO/FDIS 23131 PDF

Published Date:

Status:
[ Draft-Obsolete ]

Description:

Ellipsometry – Principles

Publisher:
Dansk Standard

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

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DRAFT * W/D S/S BY DS/ISO 23131

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Edition :	21
File Size :	1 file , 1.3 MB
Number of Pages :	23
Product Code(s) :	DSF-021, DSF-021

History

DANSK DSF/ISO/FDIS 23131

Published Date:

Ellipsometry – Principles

$13.5

DANSK DS/ISO 23131

Published Date: 04/27/2021

Ellipsometry – Principles

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