DANSK DSF/PREN ISO 23131 PDF

DANSK DSF/PREN ISO 23131 PDF

Name:
DANSK DSF/PREN ISO 23131 PDF

Published Date:

Status:
[ Draft-Obsolete ]

Description:

Ellipsometry – Principles (ISO 23131:2021)

Publisher:
Dansk Standard

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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DRAFT * W/D S/S BY DS/EN ISO 23131

This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.


Edition : 22#
File Size : 1 file , 1.4 MB
Number of Pages : 24
Product Code(s) : DSF-021, DSF-021

History

DANSK DSF/PREN ISO 23131
Published Date:
Ellipsometry – Principles (ISO 23131:2021)
$12
DANSK DS/EN ISO 23131
Published Date: 11/15/2022
Ellipsometry – Principles (ISO 23131:2021)
$19.2

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