This part of IEC 62047 specifies terms and definitions, and a performance testing method of
vibration driven MEMS electret energy harvesting devices to determine the characteristic
parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose
electrodes with a gap below 1 000 µm are covered by dielectric material with trapped charges
and are fabricated by MEMS processes such as etching, photolithography or deposition.
All current amendments available at time of purchase are included with the purchase of this document. | File Size : | 1
file
, 1.2 MB |
| ISBN(s) : | 9780580901980 |
| Number of Pages : | 20 |
| Product Code(s) : | 30323631, 30323631, 30323631 |
| Published : | 07/22/2020 |
