BS IEC 62899-301-2:2017 defines measurement terms and methods related to the critical
dimension of features and the registration accuracy of features on rigid plate masters.
General critical dimensions are defined to evaluate the shape accuracy of features on the
plate master. To evaluate the registration accuracy of features on the plate master, the
specification for the registration mark for the plate master is specified. Then, common
metrology procedures to measure the critical dimensions and the registration accuracy of the
plate master are established for device manufacturers, printing master manufacturers and
printing master manufacturing equipment vendors. The measurement terms which are
measured by agreement between the user and the supplier are measured using the
measurement methods given in this document.
Cross References:SEMI P24-94
SEMI P30-0997
SEMI P18-92
SEMI P19-92
SEMI P35-1106
SEMI P28-96
SEMI P21-92
SEMI P6-88
SEMI P48-1110
SEMI D21-0706
SEMI P43-0304
SEMI P36-1108
SEMI P47-0307
ISO 1:2002 Ed 2
All current amendments available at time of purchase are included with the purchase of this document. | File Size : | 1
file
, 2.1 MB |
| ISBN(s) : | 9780580891410 |
| Number of Pages : | 28 |
| Product Code(s) : | 30317966, 30317966, 30317966 |
| Published : | 11/16/2017 |
