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IEC 62047-11 Ed. 1.0 b:2013 PDF

IEC 62047-11 Ed. 1.0 b:2013 PDF

Name:
IEC 62047-11 Ed. 1.0 b:2013 PDF

Published Date:
07/17/2013

Status:
Active

Description:

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

Publisher:
International Electrotechnical Commission

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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Choose Document Language:
$43.5
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IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.
Edition : 1.0
File Size : 1 file , 820 KB
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 38
Published : 07/17/2013

History

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