IEC 62047-3 Ed. 1.0 b:2006 PDF

IEC 62047-3 Ed. 1.0 b:2006 PDF

Name:
IEC 62047-3 Ed. 1.0 b:2006 PDF

Published Date:
08/15/2006

Status:
Active

Description:

Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing

Publisher:
International Electrotechnical Commission

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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$7.5
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Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
Edition : 1.0
File Size : 1 file , 350 KB
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 15
Published : 08/15/2006

History


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