IEST RP-CC016.2 PDF

IEST RP-CC016.2 PDF

Name:
IEST RP-CC016.2 PDF

Published Date:
04/01/2006

Status:
Active

Description:

The Rate of Deposition of Nonvolatile Residue in Cleanrooms

Publisher:
Institute of Environmental Sciences and Technology

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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$60
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IEST RP-CC016.2 provides a uniform method and basis for determining the rate of deposition of nonvolatile residue (NVR) on surfaces in cleanrooms. In the design of the heating, ventilating, and air conditioning system, the selection of suitable filters, and the selection of materials used in the construction of the cleanroom, the requirements for the rate of deposition of NVR should be specified by the user. Designers of cleanrooms should consider the maximum deposition rates suggested by This RP when the deposition of NVR can affect the performance of products.
File Size : 1 file , 680 KB
ISBN(s) : 9781877862281
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 20
Published : 04/01/2006

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