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IEST RP-CC024.1 PDF

IEST RP-CC024.1 PDF

Name:
IEST RP-CC024.1 PDF

Published Date:
12/01/2002

Status:
Active

Description:

Measuring & Reporting Vibration in Microelectronic Facilities

Publisher:
Institute of Environmental Sciences and Technology

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
SKU:
Choose Document Language:
$61.5
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Equipment used in the manufacture, measurement, and inspection of integrated circuits is sensitive to vibration and sound. It is therefore necessary to establish levels of vibration sensitivity for them and to ensure that vibrations occurring in the facility or at the site at which they are located are below those levels. IEST RP-CC024.1 is intended to provide guidance in the microelectronics industry. It may also be applicable in pharmaceutical and biological research, metrology laboratories, and other contexts in which vibration control is important.
File Size : 1 file , 410 KB
ISBN(s) : 9781877862243
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 20
Published : 12/01/2002

History

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IEST RP-CC024.1
IEST RP-CC024.1
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Measuring & Reporting Vibration in Microelectronic Facilities
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