SIMOX PDF

SIMOX explores Separation-by-implanted-oxygen technology, a method of fabricating silicon-on-insulator structures and substrates by implanting high doses of oxygen and high temperature annealing. The book consists of sequence of chapters, each written by a key of contributor to the field and represents the first effort to compile broad knowledge of this still evolving technology. It provides the reader with a basic understanding of SIMOX technology and a background for further investigations and applications.

Author

Maria J. Anc