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  3. IEC/TR 63258 Ed. 1.0 en:2021 PDF

IEC/TR 63258 Ed. 1.0 en:2021 PDF

IEC/TR 63258 Ed. 1.0 en:2021 PDF

Name:
IEC/TR 63258 Ed. 1.0 en:2021 PDF

Published Date:
03/19/2021

Status:
Active

Description:

Nanotechnologies - A guideline for ellipsometry application to evaluate the thickness of nanoscale films

Publisher:
International Electrotechnical Commission - Technical Report

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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$57
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IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.


Edition : 1.0
File Size : 1 file , 1.3 MB
Note : This product is unavailable in Russia, Belarus, Ukraine, Canada
Number of Pages : 21
Published : 03/19/2021

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