IEC/TS 62607-6-5 Ed. 1.0 en:2022 PDF

This part of IEC TS 62607 establishes a standardized method to determine the key control characteristics
• contact resistance, and
• sheet resistance

for graphene-based materials and other two-dimensional materials by a
• transmission line measurement.

The method uses test structures applied to the 2D material by photolithographic methods consisting of several metal electrodes with increasing spacing between the electrodes. By a measurement of the voltage drop between different pairs of electrodes, sheet resistance and contact resistance can be calculated.
• The method can be applied to any other two-dimensional materials which are subject to electrical metal contact on top of the materials.
• The method provides accurate and reproducible results, if the electrical contact formed between the two-dimensional material and the metal electrodes provides ohmic contact property.