This part of ISO 14644 covers the monitoring of air cleanliness by particles in terms of concentration of airborne nanoscale particles.
For monitoring purposes, only populations of particles with a lower size limit of 0.1 microns (100 nm) or less - "nanoscale" - are considered.
The monitoring given in this document is for use mainly in "operational" states.
Note 1 For the purposes of this document, reference will be made to "nanoscale particles", which here signify all nano-objects having one (nanoplate), two (nanofibre) or three (nanoparticle) dimensions in the nanoscale.
Note 2 It should be noted that the actual behaviour of particles in the cleanroom depends on their sources and physical behaviour.
Note 3 Health and safety considerations are excluded from this document.
| Edition : | 1 |
| File Size : | 1
file
, 430 KB |
| Number of Pages : | 18 |
| Published : | 07/01/2018 |
