Name:
ISO/TR 15969:2001 PDF
Published Date:
06/01/2001
Status:
Active
Publisher:
International Organization for Standardization (Technical Report)
This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres.
| File Size : | 1 file , 870 KB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Number of Pages : | 12 |
| Published : | 06/01/2001 |
| Same As : | ISO/TR 15969:2001 |
