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  3. ISO/TR 19319:2013 PDF

ISO/TR 19319:2013 PDF

ISO/TR 19319:2013 PDF

Name:
ISO/TR 19319:2013 PDF

Published Date:
03/15/2013

Status:
Active

Description:

Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods

Publisher:
International Organization for Standardization (Technical Report)

Document status:
Active
Format:
Electronic (PDF)
Delivery time:
10 minutes
Delivery time (for Russian version):
200 business days
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$83.4
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ISO/TR 19319:2013 describes: functions and their relevance to lateral resolution: point spread function (PSF), line spread function (LSF), edge spread function (ESF), modulation transfer function (MTF) and contrast transfer function (CTF); experimental methods for the determination of lateral resolution and parameters related to lateral resolution: imaging of a narrow stripe, sharp edge and square-wave gratings; physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy.


File Size : 1 file , 8.6 MB
Note : This product is unavailable in Ukraine, Russia, Belarus
Published : 03/15/2013
Same As : ISO/TR 19319:2013

History

ISO/TR 19319:2013
ISO/TR 19319:2013
Published Date: 03/15/2013
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
$83.4
ISO/TR 19319:2003
ISO/TR 19319:2003
Published Date: 12/01/2003
Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution, analysis area, and sample area viewed by the analyser
$33.6

Related products

ISO/TR 19319:2013
ISO/TR 19319:2013
Published Date: 03/15/2013
Surface chemical analysis - Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
$83.4

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