Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement

Publisher:
International Organization for Standardization (Technical Standard)

Document status:

Active

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Electronic (PDF)

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10 minutes

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200 business days

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ISO/TS 20175:2018 describes procedures to characterize quadrupole mass spectrometers (QMSs) with an ion source of electron impact ionization and which are designed for the measurement of atomic massto- charge ratios m/z < 300.

This document is not applicable to QMSs with other ion sources, such as chemical ionization, photoionization or field ionization sources and for the measurements of higher m/z, which are mainly used to specify organic materials.

Edition :	1st
File Size :	1 file , 530 KB
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	30
Published :	04/01/2018
Same As :	ISO/TS 20175:2018

ISO/TS 20175:2018 PDF

Vacuum technology - Vacuum gauges - Characterization of quadrupole mass spectrometers for partial pressure measurement

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