ISO/TS 22933:2022 PDF

Name:
ISO/TS 22933:2022 PDF

Published Date:
04/01/2022

Status:
Active

Description:

Surface chemical analysis - Secondary ion mass spectrometry - Method for the measurement of mass resolution in SIMS

Publisher:
International Organization for Standardization (Technical Standard)

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

This document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.