This document specifies methods for characterizing and calibrating the scan axes of scanning-probe
microscopes (SPMs) for measuring geometric quantities at the highest level. It is applicable to those
providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
This document has the following objectives:
— to increase the comparability of measurements of geometrical quantities made using SPMs by
traceability to the unit of length;
— to define the minimum requirements for the calibration process and the conditions of acceptance;
— to ascertain the instrument's ability to be calibrated (assignment of a "calibrate-ability" category to
the instrument);
— to define the scope of the calibration (conditions of measurement and environments, ranges of
measurement, temporal stability, transferability);
— to provide a model, in accordance with ISO/IEC Guide 98-3, to calculate the uncertainty for simple
geometrical quantities in measurements using an SPM;
— to define the requirements for reporting results.
Cross References:ISO/IEC Guide 98-3
ISO 11039
IEC/TS 62622
ISO 18115-2
ISO 5436-1
ISO 12179
ISO 4288
ISO Guide 34
ISO Guide 30
ISO 12853
ISO 4287
ISO 3274
All current amendments available at time of purchase are included with the purchase of this document. | File Size : | 1
file
, 8.5 MB |
| ISBN(s) : | 9780580882968 |
| Note : | This product is unavailable in Russia, Ukraine, Belarus |
| Number of Pages : | 70 |
| Product Code(s) : | 30314300, 30314300, 30314300 |
| Published : | 05/31/2019 |
| Same As : | BS ISO 11952:2019 |
