Name:
ISO 11952:2014 PDF
Published Date:
05/15/2014
Status:
Active
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
| File Size : | 1 file , 2.8 MB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Number of Pages : | 66 |
| Published : | 05/15/2014 |