ISO 14606:2000 PDF

ISO 14606:2000 PDF

Name:
ISO 14606:2000 PDF

Published Date:
10/01/2000

Status:
[ Withdrawn ]

Description:

Surface chemical analysis -- Sputter depth profiling -- Optimization using layered systems as reference materials

Publisher:
International Organization for Standardization

Document status:
Active

Format:
Electronic (PDF)

Delivery time:
10 minutes

Delivery time (for Russian version):
200 business days

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Choose Document Language:
$36.9
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This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.


File Size : 1 file , 390 KB
Note : This product is unavailable in Ukraine, Russia, Belarus
Number of Pages : 15
Published : 10/01/2000
Same As : ISO 14606:2000

History

ISO 14606:2022
Published Date: 10/31/2022
Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
$37.2
ISO 14606:2000
Published Date: 10/01/2000
Surface chemical analysis -- Sputter depth profiling -- Optimization using layered systems as reference materials
$36.9

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