Name:
ISO 14606:2000 PDF
Published Date:
10/01/2000
Status:
[ Withdrawn ]
This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.
This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.
| File Size : | 1 file , 390 KB |
| Note : | This product is unavailable in Ukraine, Russia, Belarus |
| Number of Pages : | 15 |
| Published : | 10/01/2000 |
| Same As : | ISO 14606:2000 |