AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (SUPERSEDING FED-STD-209D) (S/S BY ISO14644-1-1999 AND ISO14644-2-2000)

Publisher:
Federal Specifications and Standards

Document status:

Active

Format:

Electronic (PDF)

Delivery time:

10 minutes

Delivery time (for Russian version):

200 business days

SKU:

This document establishes standard classes, and provides for alternative classes, of air cleanliness for cleanrooms and clean zones based on specified concentrations of airborne particles. It prescribes methods for verifying air cleanliness and requires that a plan be established for monitoring air cleanliness. It also provides a method for determining and describing concentrations (U descriptors) of ultrafine particles.

File Size :	1 file , 2.9 MB
Note :	This product is unavailable in Russia, Ukraine, Belarus
Number of Pages :	55
Published :	09/11/1992

FED FED-STD-209E PDF

AIRBORNE PARTICULATE CLEANLINESS CLASSES IN CLEANROOMS AND CLEAN ZONES (SUPERSEDING FED-STD-209D) (S/S BY ISO14644-1-1999 AND ISO14644-2-2000)

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